Authors:
BESHKOV G
DIMITROV DB
KOPRINAROVA J
GESHEVA K
Citation: G. Beshkov et al., PROPERTIES OF PALLADIUM SILICIDE THIN-FILMS OBTAINED BY VACUUM RAPID THERMAL ANNEALING OF RF-SPUTTERED PD FILMS ON SI, Vacuum, 51(2), 1998, pp. 177-180
Citation: G. Beshkov et al., MORPHOLOGY OF LPCVD SI3N4 FILMS AFTER HIGH-TEMPERATURE TREATMENT AND HF ETCHING, Journal of non-crystalline solids, 187, 1995, pp. 301-307