Authors: Atanos, AJ Daviet, JF Parihar, V

Citation: Aj. Atanos et al., Susceptor-based rapid thermal processing for forming ultra-shallow junctions, SOL ST TECH, 43(4), 2000, pp. 50

Authors: Yoo, WS Atanos, AJ Daviet, JF

Citation: Ws. Yoo et al., Cobalt silicide processing in a susceptor-based LP-RTP system, SOL ST TECH, 42(7), 1999, pp. 125