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Citation: Jw. Tringe et al., Hydrogen passivation in plasma-etched polycrystalline silicon resistors, EL SOLID ST, 3(11), 2000, pp. 517-519

Authors: Tringe, JW Deal, MD Plummer, JD

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Authors: Kim, D Nix, WD Deal, MD Plummer, JD

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Authors: Tringe, JW Deal, MD Plummer, JD

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