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Results: 2
Influence of hydrogen desorption on the generation of defects in LEPECVD
Authors:
Rosenblad, C Deller, HR von Kanel, H
Citation:
C. Rosenblad et al., Influence of hydrogen desorption on the generation of defects in LEPECVD, MAT SCI E B, 58(1-2), 1999, pp. 76-80
Epitaxial growth of Si by tow-energy DC-plasma chemical vapor deposition
Authors:
Mateeva, E Deller, HR Kafader, U Rosenblad, C Von Kanel, H Dommann, A
Citation:
E. Mateeva et al., Epitaxial growth of Si by tow-energy DC-plasma chemical vapor deposition, J MAT SCI L, 17(18), 1998, pp. 1545-1547
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