Authors:
Grabiec, PB
Sunyk, R
Shi, F
Popovic, G
Gotszalk, T
Hudek, P
Dumania, P
Rangelow, IW
Citation: Pb. Grabiec et al., A design and fabrication of a 3D force sensitive microprobe for surface characterization., MICROEL ENG, 46(1-4), 1999, pp. 405-408
Authors:
Gotszalk, T
Radojewski, J
Grabiec, PB
Dumania, P
Shi, F
Hudek, P
Rangelow, IW
Citation: T. Gotszalk et al., Fabrication of multipurpose piezoresistive Wheatstone bridge cantilevers with conductive microtips for electrostatic and scanning capacitance microscopy, J VAC SCI B, 16(6), 1998, pp. 3948-3953