Authors: SETSUHARA Y SUZUKI T TANAKA Y MIYAKE S SUZUKI M KUMAGAI M OGATA K KOHATA M HIGETA K EINISHI T SUZUKI Y SHIMOITANI Y MOTONAMI Y

Citation: Y. Setsuhara et al., INTERFACIAL STRUCTURE CONTROL OF CUBIC BORON-NITRIDE FILMS PREPARED BY ION-BEAM-ASSISTED DEPOSITION, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 127, 1997, pp. 851-856

Authors: KUMAGAI M SUZUKI M SUZUKI T TANAKA Y SETSUHARA Y MIYAKE S OGATA K KOHATA M HIGETA K EINISHI T SUZUKI Y SHIMOITANI Y MOTONAMI Y

Citation: M. Kumagai et al., PROPERTIES OF DEPTH-PROFILE CONTROLLED BORON-NITRIDE FILMS PREPARED BY ION-BEAM-ASSISTED DEPOSITION, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 127, 1997, pp. 977-980