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Results:
1-8
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Results: 8
Authors:
ERICSSON P
BENGTSSON S
SKARP J
Citation: P. Ericsson et al., PROPERTIES OF AL2O3-FILMS DEPOSITED ON SILICON BY ATOMIC LAYER EPITAXY, Microelectronic engineering, 36(1-4), 1997, pp. 91-94
Authors:
ERICSSON P
BENGTSSON S
Citation: P. Ericsson et S. Bengtsson, INTERNAL OXIDATION OF LOW-DOSE SEPARATION BY IMPLANTED OXYGEN WAFERS IN DIFFERENT OXYGEN NITROGEN MIXTURES/, Applied physics letters, 71(16), 1997, pp. 2310-2312
Authors:
ERICSSON P
BENGTSSON S
Citation: P. Ericsson et S. Bengtsson, INFLUENCE OF SC-1 SC-2 CLEANING ON WAFER-BONDED SILICON DIOXIDE STRUCTURES/, Journal of the Electrochemical Society, 143(11), 1996, pp. 3722-3727
Authors:
ERICSSON P
Citation: P. Ericsson, LEARNING FROM TEXTBOOKS - THEORY AND PRACTICE - BRITTON,BK, Journal of business and technical communication, 9(1), 1995, pp. 116-118
Authors:
ERICSSON P
BENGTSSON S
SODERVALL U
Citation: P. Ericsson et al., INFLUENCE OF PREBONDING CLEANING ON THE ELECTRICAL-PROPERTIES OF THE BURIED OXIDE OF BOND-AND-ETCHBACK SILICON-ON-INSULATOR MATERIALS, Journal of applied physics, 78(5), 1995, pp. 3472-3480
Authors:
BENGTSSON S
ERICSSON P
SODERVALL U
MITANI K
ABE T
Citation: S. Bengtsson et al., CHARGE-CARRIER INJECTION INTO THE BURIED OXIDE OF WAFER-BONDED SILICON-ON-INSULATOR MATERIALS, Journal of the Electrochemical Society, 142(8), 1995, pp. 2721-2726
Authors:
AFANASEV VV
ERICSSON P
BENGTSSON S
ANDERSSON MO
Citation: Vv. Afanasev et al., WAFER BONDING INDUCED DEGRADATION OF THERMAL SILICON DIOXIDE LAYERS ON SILICON, Applied physics letters, 66(13), 1995, pp. 1653-1655
Authors:
MANZ W
SZEWZYK U
ERICSSON P
AMANN R
SCHLEIFER KH
STENSTROM TA
Citation: W. Manz et al., IN-SITU IDENTIFICATION OF BACTERIA IN DRINKING-WATER AND ADJOINING BIOFILMS BY HYBRIDIZATION WITH 16S-RIBOSOMAL-RNA-DIRECTED AND 23S-RIBOSOMAL-RNA-DIRECTED FLUORESCENT OLIGONUCLEOTIDE PROBES, Applied and environmental microbiology, 59(7), 1993, pp. 2293-2298
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