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ENG
Results:
1-2
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Results: 2
A plasma immersion implantation system for materials modification
Authors:
Current, MI Liu, W Roth, IS Lamm, AJ En, WG Malik, IJ Feng, L Bryan, MA Qin, S Henley, FJ Chan, C Cheung, NW
Citation:
Mi. Current et al., A plasma immersion implantation system for materials modification, SURF COAT, 136(1-3), 2001, pp. 138-141
The effect of subsurface doping on gate oxide charging damage
Authors:
Linder, BP En, WG Cheung, NW
Citation:
Bp. Linder et al., The effect of subsurface doping on gate oxide charging damage, IEEE PLAS S, 26(6), 1998, pp. 1628-1634
Risultati:
1-2
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