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PUGALAMBERS M
FREER B
BERSTEIN J
RUBIN L
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Authors:
TIAN S
YANG SH
MORRIS S
PARAB K
TASCH AF
KAMENITSA D
REECE R
FREER B
SIMONTON RB
MAGEE C
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Authors:
TIAN S
YANG SH
MORRIS S
PARAB K
TASCH AF
KAMENITSA D
REECE R
FREER B
SIMONTON RB
MAGEE C
Citation: S. Tian et al., AN EXAMINATION OF THE EFFECT OF DOSE-RATE ON ION-IMPLANTED IMPURITY PROFILES IN SILICON, Journal of the Electrochemical Society, 142(9), 1995, pp. 3215-3219
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