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YAMAGUCHI Y
FUNAKI H
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FUNAKI H
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KONDO D
FUNAKI H
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KIHARA I
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FUNAKI H
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YAOITA E
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KIHARA I
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KATAYAMA M
FUNAKI H
ARAI E
NAKATA M
OHJI Y
IMURA R
Citation: K. Shimizu et al., STOICHIOMETRY MEASUREMENT AND ELECTRIC CHARACTERISTICS OF THIN-FILM TA2O5 INSULATOR FOR ULTRA-LARGE-SCALE INTEGRATION, Journal of applied physics, 74(1), 1993, pp. 375-380