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SCHWITZGEBEL J
EKERDT JG
GERISCHER H
HELLER A
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Authors:
ALLONGUE P
BERTAGNA V
KIELING V
GERISCHER H
Citation: P. Allongue et al., PROBING BY IN-SITU SCANNING-TUNNELING-MICROSCOPY THE INFLUENCE OF AN ORGANIC ADDITIVE ON SI ETCHING IN NAOH, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(3), 1994, pp. 1539-1542
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