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Results:
1-15
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Results: 15
Authors:
SHERIDAN TE
GOECKNER MJ
GOREE J
Citation: Te. Sheridan et al., ELECTRON VELOCITY DISTRIBUTION-FUNCTIONS IN A SPUTTERING MAGNETRON DISCHARGE FOR THE EXB DIRECTION, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 16(4), 1998, pp. 2173-2176
Authors:
PARK J
BENNETT TK
GOECKNER MJ
COHEN SA
Citation: J. Park et al., PLASMA-NEUTRAL INTERACTION IN THERMALLY COLLAPSED PLASMA, Journal of nuclear materials, 241, 1997, pp. 489-493
Authors:
GOECKNER MJ
BENNETT TK
COHEN SA
Citation: Mj. Goeckner et al., A SOURCE OF HYPERTHERMAL NEUTRALS FOR MATERIALS PROCESSING, Applied physics letters, 71(7), 1997, pp. 980-982
Authors:
SHERIDAN TE
GOECKNER MJ
GOREE J
Citation: Te. Sheridan et al., ELECTRON-DISTRIBUTION FUNCTIONS IN A SPUTTERING MAGNETRON DISCHARGE, JPN J A P 1, 34(9A), 1995, pp. 4977-4982
Authors:
GOECKNER MJ
FETHERSTON RP
HITCHON WNG
HORSWILL NC
KEITER ER
SHAMIM MM
BREUN RA
CONRAD JR
SHERIDAN TE
Citation: Mj. Goeckner et al., DYNAMICS OF COLLISIONAL PULSED PLANAR SHEATHS, Physical review. E, Statistical physics, plasmas, fluids, and related interdisciplinary topics, 51(4), 1995, pp. 3760-3763
Authors:
SHERIDAN TE
GOECKNER MJ
Citation: Te. Sheridan et Mj. Goeckner, COLLISIONAL SHEATH DYNAMICS, Journal of applied physics, 77(10), 1995, pp. 4967-4972
Authors:
ZHANG L
BOOSKE JH
COOPER RF
SHOHET JL
JACOBS JR
ANDERSON FSB
GOECKNER MJ
WICKSBERG EB
WAS G
Citation: L. Zhang et al., PLASMA-IMMERSED OXYGEN-ION IMPLANTATION OF IRON-DOPED GLASS FOR NONMETALLIC MAGNETIC HARD DISKS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3342-3346
Authors:
GOECKNER MJ
MALIK SM
CONRAD JR
BREUN RA
Citation: Mj. Goeckner et al., LASER-INDUCED FLUORESCENCE MEASUREMENT OF THE DYNAMICS OF A PULSED PLANAR SHEATH, Physics of plasmas, 1(4), 1994, pp. 1064-1074
Authors:
KEITER ER
HITCHON WNG
GOECKNER MJ
Citation: Er. Keiter et al., A KINETIC-MODEL OF PULSED SHEATHS, Physics of plasmas, 1(11), 1994, pp. 3709-3712
Authors:
KEITER ER
HITCHON WNG
GOECKNER MJ
Citation: Er. Keiter et al., A KINETIC-MODEL OF PULSED SHEATHS, Physics of plasmas, 1(11), 1994, pp. 3709-3712
Authors:
GOECKNER MJ
HENDERSON MA
MEYER JA
BREUN RA
Citation: Mj. Goeckner et al., FOURIER-TRANSFORM INFRARED-ABSORPTION SPECTROMETRY MEASUREMENTS OF A CF4 DISCHARGE IN AN ELECTRON-CYCLOTRON-RESONANCE REACTOR, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 12(6), 1994, pp. 3120-3125
Authors:
ZHANG L
SHOHET JL
DALLMANN D
BOOSKE JH
SPETH RR
SHENAI K
GOECKNER MJ
KRUGER JB
RISSMAN P
TURNER JE
PEREZALBUERNE E
LEE S
MEYYAPPAN N
Citation: L. Zhang et al., LOW-ENERGY SEPARATION BY IMPLANTATION OF OXYGEN STRUCTURES VIA PLASMASOURCE ION-IMPLANTATION, Applied physics letters, 65(8), 1994, pp. 962-964
Authors:
SPETH RR
EMMERT GA
GOECKNER MJ
Citation: Rr. Speth et al., INFLUENCE OF THE HIGH-VOLTAGE PULSE-SHAPE ON THE PLASMA SOURCE ION-IMPLANTATION PROCESS, Applied physics letters, 65(18), 1994, pp. 2272-2274
Authors:
GOECKNER MJ
MEYER JA
KIM GH
JENQ JS
MATTHEWS A
TAYLOR JW
BREUN RA
Citation: Mj. Goeckner et al., ROLE OF CONTAMINANTS IN ELECTRON-CYCLOTRON-RESONANCE PLASMAS, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 11(5), 1993, pp. 2543-2552
Authors:
GOECKNER MJ
BREUN RA
Citation: Mj. Goeckner et Ra. Breun, USING FOURIER-TRANSFORM INFRARED-ABSORPTION SPECTROMETRY TO PROBE THEINJECTED NEUTRAL GAS IN A PLASMA HAVING A HIGH IONIZATION FRACTION, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 11(3), 1993, pp. 689-693
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