Authors: VANDRIEENHUIZEN BP GOOSEN JFL LI YX BARTEK M FRENCH PJ SARRO PM WOLFFENBUTTEL RF

Citation: Bp. Vandrieenhuizen et al., DUAL STRUCTURAL POLYSILICON BIFET-COMPATIBLE SURFACE MICROMACHINING MODULE, Journal of micromechanics and microengineering, 7(3), 1997, pp. 148-150

Authors: GOOSEN JFL VANDRIEENHUIZEN BP FRENCH PJ WOLFFENBUTTEL RF

Citation: Jfl. Goosen et al., PROBLEMS OF SACRIFICIAL ETCHING IN THE PRESENCE OF ALUMINUM INTERCONNECT, Sensors and actuators. A, Physical, 62(1-3), 1997, pp. 692-697

Authors: FRENCH PJ VANDRIEENHUIZEN BP POENAR D GOOSEN JFL MALLEE R SARRO PM WOLFFENBUTTEL RF

Citation: Pj. French et al., THE DEVELOPMENT OF A LOW-STRESS POLYSILICON PROCESS COMPATIBLE WITH STANDARD DEVICE PROCESSING, Journal of microelectromechanical systems, 5(3), 1996, pp. 187-196

Authors: VANDRIEENHUIZEN BP GOOSEN JFL FRENCH PJ WOLFFENBUTTEL RF

Citation: Bp. Vandrieenhuizen et al., COMPARISON OF TECHNIQUES FOR MEASURING BOTH COMPRESSIVE AND TENSILE-STRESS IN THIN-FILMS, Sensors and actuators. A, Physical, 37-8, 1993, pp. 756-765