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Authors: GROUDEVAZOTOVA S

Citation: S. Groudevazotova, DOUBLE UNBALANCED MAGNETRON SPUTTERING SYSTEM USED FOR ION-ASSISTED THIN-FILM DEPOSITION, Vacuum, 51(2), 1998, pp. 119-126

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Authors: KOURTEV J GROUDEVAZOTOVA S GARNEV I ORLINOV V

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