Authors: GROVES TR

Citation: Tr. Groves, THEORY OF BEAM-INDUCED SUBSTRATE HEATING, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(6), 1996, pp. 3839-3844

Authors: BUTSCH R ENICHEN WA GORDON MS GROVES TR HARTLEY JG PAVICK JW PFEIFFER HC QUICKLE RJ ROCKROHR JD STICKEL W

Citation: R. Butsch et al., PERFORMANCE ENHANCEMENTS ON IBMS EL-4 ELECTRON-BEAM LITHOGRAPHY SYSTEM, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(6), 1995, pp. 2478-2482

Authors: GROVES TR

Citation: Tr. Groves, EFFICIENCY ENHANCEMENT OF MONTE-CARLO SIMULATION OF PARTICLE-BEAM INTERACTION BY SEPARATION OF STOCHASTIC AND CONTINUUM CONTRIBUTIONS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3483-3488

Authors: PFEIFFER HC DAVIS DE ENICHEN WA GORDON MS GROVES TR HARTLEY JG QUICKLE RJ ROCKROHR JD STICKEL W WEBER EV

Citation: Hc. Pfeiffer et al., EL-4, A NEW-GENERATION ELECTRON-BEAM LITHOGRAPHY SYSTEM, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(6), 1993, pp. 2332-2341

Authors: GROVES TR

Citation: Tr. Groves, EFFICIENCY OF ELECTRON-BEAM PROXIMITY EFFECT CORRECTION, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(6), 1993, pp. 2746-2753

Authors: GROVES TR HARTLEY JG PFEIFFER HC PUISTO D BAILEY DK

Citation: Tr. Groves et al., ELECTRON-BEAM LITHOGRAPHY TOOL FOR MANUFACTURE OF X-RAY MASKS, IBM journal of research and development, 37(3), 1993, pp. 411-419