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Citation: Mw. Cresswell et al., HYBRID OPTICAL-ELECTRICAL OVERLAY TEST STRUCTURE, IEEE transactions on semiconductor manufacturing, 10(2), 1997, pp. 250-255

Authors: CRESSWELL MW SNIEGOWSKI JJ GHOSHTAGORE RN ALLEN RA GUTHRIE WF GURNELL AW LINHOLM LW DIXSON RG TEAGUE EC

Citation: Mw. Cresswell et al., RECENT DEVELOPMENTS IN ELECTRICAL LINEWIDTH AND OVERLAY METROLOGY FORINTEGRATED-CIRCUIT FABRICATION PROCESSES, JPN J A P 1, 35(12B), 1996, pp. 6597-6609