Authors:
Gerlach, G
Suchaneck, G
Kohler, R
Sandner, T
Padmini, P
Krawietz, R
Pompe, W
Frey, J
Jost, O
Schonecker, A
Citation: G. Gerlach et al., Properties of sputter and sol-gel deposited PZT thin films for sensor and actuator applications: Preparation, stress and space charge distribution, self poling, FERROELECTR, 230(1-4), 1999, pp. 411-416
Authors:
Padmini, P
Krawietz, R
Kohler, R
Gerlach, G
Citation: P. Padmini et al., Preparation and stress evaluation of ferroelectric thin films of PZT basedpyroelectric sensors, FERROELECTR, 228(1-4), 1999, pp. 79-89