Authors:
Yan, M
Bogaerts, A
Gijbels, R
Goedheer, WJ
Citation: M. Yan et al., Kinetic modeling of relaxation phenomena after photodetachment in a rf electronegative SiH4 discharge - art. no. 026405, PHYS REV E, 6302(2), 2001, pp. 6405
Citation: Ktal. Burm et al., Simulations of geometrically pinched argon plasmas using an extended one-dimensional model, J PHYS D, 34(13), 2001, pp. 2000-2015
Citation: Wj. Goedheer, Lecture notes on radio-frequency discharges, dc potentials, ion and electron energy distributions, PLASMA SOUR, 9(4), 2000, pp. 507-516
Authors:
Yan, M
Bogaerts, A
Goedheer, WJ
Gijbels, R
Citation: M. Yan et al., Electron energy distribution function in capacitively coupled RF discharges: difference between electropositive Ar and electronegative SiH4 discharges, PLASMA SOUR, 9(4), 2000, pp. 583-591
Authors:
Yan, M
Bogaerts, A
Gijbels, R
Goedheer, WJ
Citation: M. Yan et al., Spatial behavior of energy relaxation of electrons in capacitively coupleddischarges: Comparison between Ar and SiH4, J APPL PHYS, 87(8), 2000, pp. 3628-3636
Citation: M. Yan et Wj. Goedheer, A PIC-MC simulation of the effect of frequency on the characteristics of VHFSiH4/H-2 discharges, PLASMA SOUR, 8(3), 1999, pp. 349-354
Citation: M. Yan et Wj. Goedheer, Particle-in-cell/ Monte Carlo simulation of radio frequency SiH4/H-2 discharges, IEEE PLAS S, 27(5), 1999, pp. 1399-1405
Citation: M. Yan et Wj. Goedheer, A kinetic simulation of the effect of frequency on the power dissipation in VHF SiH4/H-2 discharges, CZEC J PHYS, 48, 1998, pp. 257-262