Authors:
Basnar, B
Golka, S
Gornik, E
Harasek, S
Bertagnolli, E
Schatzmayr, M
Smoliner, J
Citation: B. Basnar et al., Calibrated scanning capacitance microscopy investigations on p-doped Si multilayers, J VAC SCI B, 19(5), 2001, pp. 1808-1812
Authors:
Leicht, M
Fritzer, G
Basnar, B
Golka, S
Smoliner, J
Citation: M. Leicht et al., A reliable course of scanning capacitance microscopy analysis applied for 2D-dopant profilings of power MOSFET devices, MICROEL REL, 41(9-10), 2001, pp. 1535-1537