Authors:
PIERRAT C
SIEGRIST T
DEMARCO J
HARRIOTT L
VAIDYA S
Citation: C. Pierrat et al., MULTIPLE-LAYER BLANK STRUCTURE FOR PHASE-SHIFTING MASK FABRICATION, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(1), 1996, pp. 63-68
Authors:
SNYDER CW
FREI MR
BAHNCK D
HOPKINS L
HULL R
HARRIOTT L
CHIU TY
FULLOWAN T
TSENG B
Citation: Cw. Snyder et al., COMBINING TRANSMISSION ELECTRON-MICROSCOPY WITH FOCUSED ION-BEAM SPUTTERING FOR MICROSTRUCTURAL INVESTIGATIONS OF ALGAAS GAAS HETEROJUNCTION BIPOLAR-TRANSISTORS/, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(4), 1995, pp. 1514-1518