Authors:
QIU BC
OOI BS
BRYCE AC
HICKS SE
WILKINSON CDW
DELARUE RM
MARSH JH
Citation: Bc. Qiu et al., REDUCED DAMAGE REACTIVE ION ETCHING PROCESS FOR FABRICATION OF INGAASP INGAAS MULTIPLE-QUANTUM-WELL RIDGE-WAVE-GUIDE LASERS/, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 16(4), 1998, pp. 1818-1822
Authors:
MCLAUGHLIN AJ
BONAR JR
JUBBER MG
MARQUES PVS
HICKS SE
WILKINSON CDW
AITCHISON JS
Citation: Aj. Mclaughlin et al., DEEP, VERTICAL ETCHING OF FLAME HYDROLYSIS DEPOSITED HI-SILICA GLASS-FILMS FOR OPTOELECTRONIC AND BIOELECTRONIC APPLICATIONS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 16(4), 1998, pp. 1860-1863
Authors:
HICKS SE
MURAD SK
STURROCK I
WILKINSON CDW
Citation: Se. Hicks et al., IMPROVING THE RESISTANCE OF PECVD SILICON-NITRIDE TO DRY-ETCHING USING AN OXYGEN PLASMA, Microelectronic engineering, 35(1-4), 1997, pp. 41-44
Authors:
OOI BS
HICKS SE
BRYCE AC
WILKINSON CDW
MARSH JH
Citation: Bs. Ooi et al., STUDY OF C2F6 OVERETCH INDUCED DAMAGE AND THE EFFECTS OF OVERETCH ON SUBSEQUENT SICL4 ETCH OF GAAS ALGAAS/, Journal of applied physics, 77(10), 1995, pp. 4961-4966
Authors:
HAMILTON CJ
HICKS SE
VOGELE B
MARSH JH
AITCHISON JS
Citation: Cj. Hamilton et al., SUPPRESSION OF BANDGAP SHIFTS IN GAAS ALGAAS MULTIQUANTUM WELLS USINGHYDROGEN PLASMA PROCESSING/, Electronics Letters, 31(16), 1995, pp. 1393-1394
Authors:
HICKS SF
HANLY JM
HICKS SE
SHEN GR
MCELLISTREM MT
Citation: Sf. Hicks et al., NEUTRON-SCATTERING CROSS-SECTIONS FOR PB-204,206 NEUTRON AND PROTON AMPLITUDES OF E2 AND E3 EXCITATIONS, Physical review. C. Nuclear physics, 49(1), 1994, pp. 103-115