Authors: HOHN FJ

Citation: Fj. Hohn, PAPERS FROM THE 37TH INTERNATIONAL-SYMPOSIUM ON ELECTRON, ION, AND PHOTON BEAMS - 1-4 JUNE 1993 SHERATON-HARBOR-ISLAND-HOTEL SAN-DIEGO, CALIFORNIA - PREFACE, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(6), 1993, pp. 2151-2151

Authors: ROSENFIELD MG THOMSON MGR COANE PJ KWIETNIAK KT KELLER J KLAUS DP VOLANT RP BLAIR CR TREMAINE KS NEWMAN TH HOHN FJ

Citation: Mg. Rosenfield et al., ELECTRON-BEAM LITHOGRAPHY FOR ADVANCED DEVICE PROTOTYPING - PROCESS TOOL METROLOGY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(6), 1993, pp. 2615-2620

Authors: REEVES CM WIND SJ HOHN FJ BUCCHIGNANO JJ LII YT KLAUS DP

Citation: Cm. Reeves et al., FABRICATION AND CHARACTERIZATION OF COMPACT 100NM SCALE METAL-OXIDE-SEMICONDUCTOR FIELD-EFFECT TRANSISTORS, Microelectronic engineering, 21(1-4), 1993, pp. 409-418