Authors: HORSTMANN JT HILLERINGMANN U GOSER KF

Citation: Jt. Horstmann et al., MATCHING ANALYSIS OF DEPOSITION DEFINED 50-NM MOSFETS, I.E.E.E. transactions on electron devices, 45(1), 1998, pp. 299-306

Authors: HORSTMANN JT HILLERINGMANN U GOSER K

Citation: Jt. Horstmann et al., CHARACTERIZATION OF SUB-100 NM-MOS-TRANSISTORS PROCESSED BY OPTICAL LITHOGRAPHY AND A SIDEWALL-ETCHBACK TECHNIQUE, Microelectronic engineering, 30(1-4), 1996, pp. 431-434