Authors:
SRINIVASAN U
HOUSTON MR
HOWE RT
MABOUDIAN R
Citation: U. Srinivasan et al., ALKYLTRICHLOROSILANE-BASED SELF-ASSEMBLED MONOLAYER FILMS FOR STICTION REDUCTION IN SILICON MICROMACHINES, Journal of microelectromechanical systems, 7(2), 1998, pp. 252-260
Citation: Mr. Houston et al., EFFECT OF HYDROGEN TERMINATION ON THE WORK OF ADHESION BETWEEN ROUGH POLYCRYSTALLINE SILICON SURFACES, Journal of applied physics, 81(8), 1997, pp. 3474-3483
Citation: Ta. Cloud et al., PROCESSING AND PERFORMANCE OF GOLD MCMS, IEEE transactions on components, hybrids, and manufacturing technology, 16(7), 1993, pp. 724-730