Authors: VOLKEL R HERZIG HP NUSSBAUM P BLATTNER P DANDLIKER R CULLMANN E HUGLE WB

Citation: R. Volkel et al., MICROLENS LITHOGRAPHY AND SMART MASKS, Microelectronic engineering, 35(1-4), 1997, pp. 513-516

Authors: VOLKEL R HERZIG HP NUSSBAUM P SINGER W DANDLIKER R HUGLE WB

Citation: R. Volkel et al., MICROLENS LITHOGRAPHY - A NEW APPROACH FOR LARGE DISPLAY FABRICATION, Microelectronic engineering, 30(1-4), 1996, pp. 107-110

Authors: VOLKEL R HERZIG HP NUSSBAUM P DANDLIKER R HUGLE WB

Citation: R. Volkel et al., MICROLENS ARRAY IMAGING-SYSTEM FOR PHOTOLITHOGRAPHY, Optical engineering, 35(11), 1996, pp. 3323-3330