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Results:
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Results: 2
Process stability of ferroelectric PLZT thin film sputtering for FRAM (R) production
Authors:
Suu, K Tani, N Chu, F Hickert, G Hadnagy, TD Davenport, T
Citation:
K. Suu et al., Process stability of ferroelectric PLZT thin film sputtering for FRAM (R) production, INTEGR FERR, 26(1-4), 1999, pp. 711-721
Ferroelectric properties of PLZT thin films prepared using ULVAC ZX-1000 sputtering system
Authors:
Chu, F Hickert, G Hadnagy, TD Suu, KK
Citation:
F. Chu et al., Ferroelectric properties of PLZT thin films prepared using ULVAC ZX-1000 sputtering system, INTEGR FERR, 26(1-4), 1999, pp. 749-757
Risultati:
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