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Citation: Kk. Hirakuri et al., Influence of the methane concentration on HF-CVD diamond under atmosphericpressure, VACUUM, 63(3), 2001, pp. 449-454

Authors: Hirakuri, KK Kurata, T Mutsukura, N Friedbacher, G Ohuchi, M

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Authors: Kobayashi, T Hirakuri, KK Mutsukura, N Machi, Y

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Authors: Komatsu, Y Alanazi, A Hirakuri, KK

Citation: Y. Komatsu et al., Application of diamond-like carbon films to the integrated circuit fabrication process, DIAM RELAT, 8(11), 1999, pp. 2018-2021