Authors: Senzaki, Y Alers, GB Hochberg, AK Roberts, DA Norman, JAT Fleming, RM Krautter, H

Citation: Y. Senzaki et al., CVD of Zr-Sn-Ti-O thin films by direct injection of solventless liquid precursor mixtures, EL SOLID ST, 3(9), 2000, pp. 435-436

Authors: Senzaki, Y Hochberg, AK Norman, JAT

Citation: Y. Senzaki et al., MOCVD of high-k dielectrics, tantalum nitride and copper from directly injected liquid precursors, ADV MAT OPT, 10(3-5), 2000, pp. 93-103