Authors:
Klauser, R
Hong, IH
Su, HJ
Chen, TT
Gwo, S
Wang, SC
Chuang, TJ
Gritsenko, VA
Citation: R. Klauser et al., Oxidation states in scanning-probe-induced Si3N4 to SiOx conversion studied by scanning photoemission microscopy, APPL PHYS L, 79(19), 2001, pp. 3143-3145