Authors:
Zhang, W
Sui, ML
Hu, KY
Li, DX
Guo, XN
He, GH
Zhou, BL
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Citation: Ky. Hu et Tt. Tang, Lie algebraic aberration theory and calculation method for combined electron beam focusing-deflection systems, J VAC SCI B, 16(6), 1998, pp. 3248-3255