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Results: 2

Authors: Hunsche, B Vergohl, M Neuhauser, H Klose, F Szyszka, B Matthee, T
Citation: B. Hunsche et al., Effect of deposition parameters on optical and mechanical properties of MF- and DC-sputtered Nb2O5 films, THIN SOL FI, 392(2), 2001, pp. 184-190

Authors: Vergohl, M Hunsche, B Malkomes, N Matthee, T Szyszka, B
Citation: M. Vergohl et al., Stabilization of high-deposition-rate reactive magnetron sputtering of oxides by in situ spectroscopic ellipsometry and plasma diagnostics, J VAC SCI A, 18(4), 2000, pp. 1709-1712
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