Authors:
Hunsche, B
Vergohl, M
Neuhauser, H
Klose, F
Szyszka, B
Matthee, T
Citation: B. Hunsche et al., Effect of deposition parameters on optical and mechanical properties of MF- and DC-sputtered Nb2O5 films, THIN SOL FI, 392(2), 2001, pp. 184-190
Authors:
Vergohl, M
Hunsche, B
Malkomes, N
Matthee, T
Szyszka, B
Citation: M. Vergohl et al., Stabilization of high-deposition-rate reactive magnetron sputtering of oxides by in situ spectroscopic ellipsometry and plasma diagnostics, J VAC SCI A, 18(4), 2000, pp. 1709-1712