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Results: 1-7 |
Results: 7
PATTERNED THICK PHOTORESIST LAYERS FOR PROTECTION OF PROTRUDING STRUCTURES DURING WET AND DRY-ETCHING PROCESSES
Authors: INDERMUHLE PF ROTH S DELLMANN L DEROOIJ NF
Citation: Pf. Indermuhle et al., PATTERNED THICK PHOTORESIST LAYERS FOR PROTECTION OF PROTRUDING STRUCTURES DURING WET AND DRY-ETCHING PROCESSES, Journal of micromechanics and microengineering, 8(2), 1998, pp. 74-76
CVD DIAMOND PROBES FOR NANOTECHNOLOGY
Authors: NIEDERMANN P HANNI W MOREL D PERRET A SKINNER N INDERMUHLE PF DEROOIJ NF BUFFAT PA
Citation: P. Niedermann et al., CVD DIAMOND PROBES FOR NANOTECHNOLOGY, Applied physics A: Materials science & processing, 66, 1998, pp. 31-34
ELECTROLYTIC THIN-LAYER SCANNING TUNNELING MICROSCOPE - FABRICATION AND FIRST RESULTS
Authors: INDERMUHLE PF AMMANN E HARING P KOTZ R SIEGENTHALER H DEROOIJ NF
Citation: Pf. Indermuhle et al., ELECTROLYTIC THIN-LAYER SCANNING TUNNELING MICROSCOPE - FABRICATION AND FIRST RESULTS, Microelectronic engineering, 42, 1998, pp. 547-550
ATOMIC-FORCE MICROSCOPY USING CANTILEVERS WITH INTEGRATED TIPS AND PIEZOELECTRIC LAYERS FOR ACTUATION AND DETECTION
Authors: INDERMUHLE PF SCHURMANN G RACINE GA DEROOIJ NF
Citation: Pf. Indermuhle et al., ATOMIC-FORCE MICROSCOPY USING CANTILEVERS WITH INTEGRATED TIPS AND PIEZOELECTRIC LAYERS FOR ACTUATION AND DETECTION, Journal of micromechanics and microengineering, 7(3), 1997, pp. 218-220
FABRICATION AND CHARACTERIZATION OF CANTILEVERS WITH INTEGRATED SHARPTIPS AND PIEZOELECTRIC ELEMENTS FOR ACTUATION AND DETECTION FOR PARALLEL AFM APPLICATIONS
Authors: INDERMUHLE PF SCHURMANN G RACINE GA DEROOIJ NF
Citation: Pf. Indermuhle et al., FABRICATION AND CHARACTERIZATION OF CANTILEVERS WITH INTEGRATED SHARPTIPS AND PIEZOELECTRIC ELEMENTS FOR ACTUATION AND DETECTION FOR PARALLEL AFM APPLICATIONS, Sensors and actuators. A, Physical, 60(1-3), 1997, pp. 186-190
SELF-SHARPENING TIP INTEGRATED ON MICRO CANTILEVERS WITH SELF-EXCITING PIEZOELECTRIC SENSOR FOR PARALLEL ATOMIC-FORCE MICROSCOPY
Authors: INDERMUHLE PF SCHURMANN G RACINE GA DEROOIJ NF
Citation: Pf. Indermuhle et al., SELF-SHARPENING TIP INTEGRATED ON MICRO CANTILEVERS WITH SELF-EXCITING PIEZOELECTRIC SENSOR FOR PARALLEL ATOMIC-FORCE MICROSCOPY, Applied physics letters, 70(17), 1997, pp. 2318-2320
AFM IMAGING WITH AN XY-MICROPOSITIONER WITH INTEGRATED TIP
Authors: INDERMUHLE PF JAECKLIN VP BRUGGER J LINDER C DEROOIJ NF BINGGELI M
Citation: Pf. Indermuhle et al., AFM IMAGING WITH AN XY-MICROPOSITIONER WITH INTEGRATED TIP, Sensors and actuators. A, Physical, 47(1-3), 1995, pp. 562-565
Risultati: 1-7 |