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Authors: INGRAM SG LINFIELD EH BROWN KM JONES GAC RICHIE DA KELLY MJ

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Authors: LAW VJ BRAITHWAITE NS INGRAM SG CLARY DC JONES GAC

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Authors: LAW VJ INGRAM SG JONES GAC

Citation: Vj. Law et al., ECR MAGNETIC-MIRROR COUPLED PLASMA-ETCHING OF GAAS USING CH4-H2-AR, Semiconductor science and technology, 6(9), 1991, pp. 945-947

Authors: LAW VJ INGRAM SG TEWORDT M JONES GAC

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