Authors:
JAIN A
KODAS TT
JAIRATH R
HAMPDENSMITH MJ
Citation: A. Jain et al., SELECTIVE AND BLANKET COPPER CHEMICAL-VAPOR-DEPOSITION FOR ULTRA-LARGE-SCALE INTEGRATION, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(6), 1993, pp. 2107-2113