Authors: CASS TR HENDRICKS D JAU J DOHSE HJ BRODIE AD MEISBURGER WD

Citation: Tr. Cass et al., APPLICATION OF THE SEMSPEC ELECTRON-BEAM INSPECTION SYSTEM TO IN-PROCESS DEFECT DETECTION ON SEMICONDUCTOR WAFERS, Microelectronic engineering, 30(1-4), 1996, pp. 567-570

Authors: BRODIE AD CHEN ZW JAU J MEISBURGER D GRENON B

Citation: Ad. Brodie et al., INSPECTION OF OPTICAL PHASE-SHIFTING MASKS WITH AN AUTOMATED ELECTRON-BEAM SYSTEM, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3595-3599