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Chandrasekhar, D
Hervig, RL
Mayer, JW
Smith, DJ
Jasper, C
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Authors:
Jones, KS
Banisaukas, H
Glassberg, J
Andideh, E
Jasper, C
Hoover, A
Agarwal, A
Rendon, M
Citation: Ks. Jones et al., Transient enhanced diffusion after laser thermal processing of ion implanted silicon, APPL PHYS L, 75(23), 1999, pp. 3659-3661
Citation: C. Jasper et al., The effect of implantation, energy, and dose on extended defect formation for MeV phosphorus implanted silicon, APPL PHYS L, 75(17), 1999, pp. 2629-2631