Citation: O. Leroy et al., Two-dimensional modelling of CH4-H-2 radio-frequency discharges for a-C : H deposition, EPJ-APPL PH, 16(2), 2001, pp. 121-130
Citation: J. Amorim et al., Laser-induced resonance fluorescence as a diagnostic technique in non-thermal equilibrium plasmas, J PHYS D, 33(9), 2000, pp. R51-R65
Citation: M. Hertl et J. Jolly, Laser-induced fluorescence detection and kinetics of SiH2 radicals in Ar/H-2/SiH4 RF discharges, J PHYS D, 33(4), 2000, pp. 381-388
Authors:
Pierson, JF
Kim, KS
Jolly, J
Mencaraglia, D
Citation: Jf. Pierson et al., Crystallization of n-doped amorphous silicon PECVD films: comparison between SPC and RTA methods, J NON-CRYST, 270(1-3), 2000, pp. 91-96