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DENBOER DJ
FUKUDA H
HELMIG J
VANDERHILST JBC
JANSSEN GCAM
KALKMAN AJ
RADELAAR S
Citation: Dj. Denboer et al., SIOF AND SIO2 DEPOSITION IN A HDP REACTOR - TOOL CHARACTERIZATION ANDFILM ANALYSIS, Microelectronics and reliability, 38(2), 1998, pp. 281-286
Authors:
KALKMAN AJ
DENBOER DJ
FUKUDA H
VANDERHILST JBC
JANSSEN GCAM
RADELAAR S
Citation: Aj. Kalkman et al., SIOFX AND SIO2 DEPOSITION IN AN ECR-HDP REACTOR - TOOL CHARACTERIZATION AND FILM ANALYSIS, Microelectronic engineering, 37-8(1-4), 1997, pp. 271-276
Authors:
LOKKER JP
KALKMAN AJ
SCHELLEVIS H
JANSSEN GCAM
RADELAAR S
Citation: Jp. Lokker et al., MECHANICAL-BEHAVIOR DURING THERMAL CYCLING OF ALVPD LINE PATTERNS, Microelectronic engineering, 33(1-4), 1997, pp. 129-135
Authors:
KALKMAN AJ
PELLEMANS HPM
KLAASSEN TO
WENCKEBACH WT
Citation: Aj. Kalkman et al., FAR-INFRARED PUMP-PROBE MEASUREMENT OF THE LIFETIME OF THE 2P(-1) SHALLOW DONOR LEVEL IN N-GAAS, International journal of infrared and millimeter waves, 17(3), 1996, pp. 569-577