Authors:
ROSENBUSCH A
KALUS CK
HOFMANN U
IRMSCHER M
Citation: A. Rosenbusch et al., ADVANCED APPLICATION OF HIERARCHY REORGANIZATION IN E-BEAM LITHOGRAPHY, Microelectronic engineering, 30(1-4), 1996, pp. 77-80
Authors:
ROSENBUSCH A
HOFMANN U
KALUS CK
ENDO H
KIMURA Y
ENDO A
Citation: A. Rosenbusch et al., HIERARCHY OPTIMIZATION - A MEANS TO ENHANCE EFFICIENCY IN E-BEAM AND OPTICAL LITHOGRAPHY, JPN J A P 1, 34(12B), 1995, pp. 6631-6638