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Authors: ROSENBUSCH A KALUS CK HOFMANN U IRMSCHER M
Citation: A. Rosenbusch et al., ADVANCED APPLICATION OF HIERARCHY REORGANIZATION IN E-BEAM LITHOGRAPHY, Microelectronic engineering, 30(1-4), 1996, pp. 77-80

Authors: ROSENBUSCH A HOFMANN U KALUS CK ENDO H KIMURA Y ENDO A
Citation: A. Rosenbusch et al., HIERARCHY OPTIMIZATION - A MEANS TO ENHANCE EFFICIENCY IN E-BEAM AND OPTICAL LITHOGRAPHY, JPN J A P 1, 34(12B), 1995, pp. 6631-6638
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