Citation: T. Sakamoto et al., SINGLE-ELECTRON TRANSISTORS FABRICATED FROM A DOPED-SI FILM IN A SILICON-ON-INSULATOR SUBSTRATE, Applied physics letters, 72(7), 1998, pp. 795-796
Authors:
SAKAMOTO T
KAWAURA H
BABA T
FUJITA J
OCHIAI Y
Citation: T. Sakamoto et al., FABRICATION OF 30 NM GATE LENGTH ELECTRICALLY VARIABLE SHALLOW-JUNCTION METAL-OXIDE-SEMICONDUCTOR FIELD-EFFECT TRANSISTORS USING A CALIXARENE RESIST, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 15(6), 1997, pp. 2806-2808