Authors: SMIRNOV VK LEPSHIN PA KRIVELEVICH SA KIBALOV DS

Citation: Vk. Smirnov et al., TOPOGRAPHY OF THE SILICON SURFACE BOMBARDED WITH NITROGEN-IONS AT VARIOUS ENERGIES AND ANGLES OF INCIDENCE, Inorganic materials, 34(11), 1998, pp. 1081-1084

Authors: KIBALOV DS SMIRNOV VK

Citation: Ds. Kibalov et Vk. Smirnov, HOW TO ANALYZE HIGH-ASPECT-RATIO PITS WITH THE COAXIAL SCANNING AUGERMICROPROBE, Scanning, 17(3), 1995, pp. 141-143