Citation: M. Kildemo et B. Drevillon, REAL-TIME CONTROL OF THE DEPOSITION OF OPTICAL COATINGS BY MULTIWAVELENGTH ELLIPSOMETRY, Surface & coatings technology, 101(1-3), 1998, pp. 480-485
Citation: M. Kildemo et al., MEASUREMENT OF THE ABSORPTION-EDGE OF THICK TRANSPARENT SUBSTRATES USING THE INCOHERENT REFLECTION MODEL AND SPECTROSCOPIC UV VISIBLE NEAR IR ELLIPSOMETRY, Thin solid films, 313, 1998, pp. 108-113
Citation: M. Kildemo et al., A DIRECT ROBUST FEEDBACK METHOD FOR GROWTH-CONTROL OF OPTICAL COATINGS BY MULTIWAVELENGTH ELLIPSOMETRY, Thin solid films, 313, 1998, pp. 484-489
Citation: M. Kildemo et al., SPECTROELLIPSOMETRIC METHOD FOR PROCESS MONITORING SEMICONDUCTOR THIN-FILMS AND INTERFACES, Applied optics, 37(22), 1998, pp. 5145-5149
Citation: M. Kildemo, REAL-TIME MONITORING AND GROWTH-CONTROL OF SI-GRADIENT-INDEX STRUCTURES BY MULTIWAVELENGTH ELLIPSOMETRY, Applied optics, 37(1), 1998, pp. 113-124
Citation: M. Kildemo et al., APPROXIMATION OF REFLECTION COEFFICIENTS FOR RAPID REAL-TIME CALCULATION OF INHOMOGENEOUS FILMS, Journal of the Optical Society of America. A, Optics, image science,and vision., 14(4), 1997, pp. 931-939
Citation: M. Kildemo et al., REAL-TIME CONTROL BY MULTIWAVELENGTH ELLIPSOMETRY OF PLASMA-DEPOSITEDMULTILAYERS ON GLASS BY USE OF AN INCOHERENT-REFLECTION MODEL, Applied optics, 36(25), 1997, pp. 6352-6359
Citation: M. Kildemo et al., REAL-TIME CONTROL OF THE GROWTH OF SILICON ALLOY MULTILAYERS BY MULTIWAVELENGTH ELLIPSOMETRY, Thin solid films, 291, 1996, pp. 46-50
Citation: M. Kildemo et B. Drevillon, REAL-TIME MONITORING OF THE GROWTH OF TRANSPARENT THIN-FILMS BY SPECTROSCOPIC ELLIPSOMETRY, Review of scientific instruments, 67(5), 1996, pp. 1956-1960
Authors:
ETEMADI R
GODET C
KILDEMO M
BOUREE JE
BRENOT R
DREVILLON B
Citation: R. Etemadi et al., DUAL-MODE RADIO-FREQUENCY MICROWAVE PLASMA DEPOSITION OF AMORPHOUS-SILICON OXIDE THIN-FILMS, Journal of non-crystalline solids, 187, 1995, pp. 70-74
Citation: M. Kildemo et B. Drevillon, REAL-TIME MONITORING OF THE GROWTH OF TRANSPARENT THIN-FILMS BY SPECTROSCOPIC ELLIPSOMETRY, Applied physics letters, 67(7), 1995, pp. 918-920