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OTT AW
KLAUS JW
JOHNSON JM
GEORGE SM
MCCARLEY KC
WAY JD
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Citation: Jw. Klaus et al., GROWTH OF SIO2 AT ROOM-TEMPERATURE WITH THE USE OF CATALYZED SEQUENTIAL HALF-REACTIONS, Science, 278(5345), 1997, pp. 1934-1936
Citation: Jw. Klaus et al., ATOMIC LAYER CONTROLLED GROWTH OF SIO2-FILMS USING BINARY REACTION SEQUENCE CHEMISTRY, Applied physics letters, 70(9), 1997, pp. 1092-1094
Authors:
OTT AW
MCCARLEY KC
KLAUS JW
WAY JD
GEORGE SM
Citation: Aw. Ott et al., ATOMIC LAYER CONTROLLED DEPOSITION OF AL2O3 FILMS USING BINARY REACTION SEQUENCE CHEMISTRY, Applied surface science, 107, 1996, pp. 128-136