Citation: M. Macek et al., A study of plasma parameters in a BAI 730 M triode ion plating system by means of a Langmuir probe and plasma mass and energy spectroscopy, SURF COAT, 135(2-3), 2001, pp. 208-220
Authors:
Kadlec, S
Macek, M
Wouters, S
Meert, B
Navinsek, B
Panjan, P
Quaeyhaegens, C
Stals, LM
Citation: S. Kadlec et al., Plasma diagnostics of triode ion-plating systems by energy-resolved mass spectroscopy and comparison of TiN film properties, SURF COAT, 119, 1999, pp. 1211-1218
Authors:
Macek, M
Navinsek, B
Panjan, P
Kadlec, S
Wouters, S
Quaeyhaegens, C
Stals, LM
Citation: M. Macek et al., Energy and mass spectroscopy studies during triode ion plating of TiN films in two different layouts, SURF COAT, 113(1-2), 1999, pp. 149-156