Authors: Tashtoush, A Landsberger, LM Essalik, A Kahrizi, M Paranjape, M Currie, JF Pandy, A

Citation: A. Tashtoush et al., Experimental characterization of the Si/Al/tetramethylammonium hydroxide system, J ELCHEM SO, 148(7), 2001, pp. C456-C460

Authors: Pandy, A Landsberger, LM Kahrizi, M

Citation: A. Pandy et al., Mask-under-etch characterization of Si{110} in TMAH, CAN J EL C, 25(1), 2000, pp. 19-24

Authors: Grudin, O Marinescu, R Landsberger, L Cheeke, D Kahrizi, M

Citation: O. Grudin et al., CMOS-compatible high-temperature microheater: Microstructure release and testing, CAN J EL C, 25(1), 2000, pp. 29-33

Authors: Landsberger, LM Ghayour, R Sayedi, M Kahrizi, M Landheer, D Bardwell, JA Riopel, Y Jean, C Logiudice, V

Citation: Lm. Landsberger et al., Electrical characterization of metal-oxide-semiconductor capacitors with anodic and plasma-nitrided oxides, J VAC SCI A, 18(2), 2000, pp. 676-680

Authors: Paranjape, M Pandy, A Brida, S Landsberger, L Kahrizi, M Zen, M

Citation: M. Paranjape et al., Dual-doped TMAH silicon etchant for microelectromechanical structures and systems applications, J VAC SCI A, 18(2), 2000, pp. 738-742