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Results: 3
Diagnostics of high-resistivity GaAs wafers by microwave photoconductivity
Authors:
Vlasenko, LS Gorelenok, AT Emtsev, VV Kamanin, AV Kokhanovskii, SI Poloskin, DS Shmidt, NM
Citation:
Ls. Vlasenko et al., Diagnostics of high-resistivity GaAs wafers by microwave photoconductivity, TECH PHYS L, 27(1), 2001, pp. 9-10
Surface gettering of background impurities and defects in GaAs wafers
Authors:
Vlasenko, LS Gorelenok, AT Emtsev, VV Kamanin, AV Poloskin, DS Shmidt, NM
Citation:
Ls. Vlasenko et al., Surface gettering of background impurities and defects in GaAs wafers, SEMICONDUCT, 35(2), 2001, pp. 177-180
Dopant impurity diffusion from polymer diffusants and its applications in semiconductor device technology. A review
Authors:
Guk, EG Kamanin, AV Shmidt, NM Shuman, VB Yurre, TA
Citation:
Eg. Guk et al., Dopant impurity diffusion from polymer diffusants and its applications in semiconductor device technology. A review, SEMICONDUCT, 33(3), 1999, pp. 265-275
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