Authors:
Matsumura, H
Kamesaki, K
Masuda, A
Izumi, A
Citation: H. Matsumura et al., Catalytic chemical sputtering: A novel method for obtaining large-grain polycrystalline silicon, JPN J A P 2, 40(3B), 2001, pp. L289-L291
Authors:
Kamesaki, K
Masuda, A
Izumi, A
Matsumura, H
Citation: K. Kamesaki et al., Proposal of catalytic chemical sputtering method and its application to prepare large grain size poly-Si, THIN SOL FI, 395(1-2), 2001, pp. 169-172
Authors:
Shibahara, K
Egusa, K
Kamesaki, K
Furumoto, H
Citation: K. Shibahara et al., Improvement in antimony-doped ultrashallow junction sheet resistance by dopant pileup reduction at the SiO2/Si interface, JPN J A P 1, 39(4B), 2000, pp. 2194-2197