Authors:
Im, J
Auciello, O
Baumann, PK
Streiffer, SK
Kaufman, DY
Krauss, AR
Citation: J. Im et al., Magnetron sputter-deposited multilayer (BaxSr1x)Ti1+yO3+Z thin films for passive and active devices, INTEGR FERR, 34(1-4), 2001, pp. 1703-1710
Authors:
Im, J
Auciello, O
Baumann, PK
Streiffer, SK
Kaufman, DY
Krauss, AR
Citation: J. Im et al., Composition-control of magnetron-sputter-deposited (BaxSr1-x)Ti1+yO3+z thin films for voltage tunable devices, APPL PHYS L, 76(5), 2000, pp. 625-627
Authors:
Kaufman, DY
DeLuca, PM
Tsai, T
Barnett, SA
Citation: Dy. Kaufman et al., High-rate deposition of biaxially textured yttria-stabilized zirconia by dual magnetron oblique sputtering, J VAC SCI A, 17(5), 1999, pp. 2826-2829