Authors: Damm, C Peschel, T Risse, S Kirschstein, UC

Citation: C. Damm et al., Wafer stage assembly for ion projection lithography, MICROEL ENG, 57-8, 2001, pp. 181-185

Authors: Damm, C Gebhardt, A Peschel, T Kirschstein, UC

Citation: C. Damm et al., Adjustment and mounting of stencil masks for ion projection lithography, MICROEL ENG, 57-8, 2001, pp. 187-190