Citation: K. Volz et al., Heteroepitaxial SiC films grown in Si by CH4 plasma immersion ion implantation: Conditions and mechanisms of their formation, NUCL INST B, 175, 2001, pp. 569-574
Authors:
Volz, K
Rauschenbach, B
Klatt, C
Ensinger, W
Citation: K. Volz et al., Ammonia plasma immersion ion implantation into silicon: Composition and structure of the resulting silicon-nitrogen-hydrogen system, NUCL INST B, 166, 2000, pp. 75-81
Authors:
Azevedo, GD
Dias, JF
dos Santos, JHR
Grande, PL
Behar, M
Klatt, C
Kalbitzer, S
Citation: Gd. Azevedo et al., Angular dependence of the electronic stopping power of Li ions channeled around the Si < 1 0 0 > direction, NUCL INST B, 161, 2000, pp. 145-149
Authors:
Azevedo, GD
Kaschny, JRA
Dias, JF
Grande, PL
Behar, M
Klatt, C
Kalbitzer, S
Citation: Gd. Azevedo et al., Charge equilibration process for channeled He ions along the Si < 100 > direction, NUCL INST B, 148(1-4), 1999, pp. 168-171